Enhanced mass sensing using torsional and lateral resonances in microcantilevers
Enhanced mass sensing using torsional and lateral resonances in microcantilevers
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DOI：
10.1063/1.1759379
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发表时间：
2004-06-07
影响因子：
4
通讯作者：
Reifenberger, R
中科院分区：
文献类型：
--
作者：
Sharos, LB;Raman, A;Reifenberger, R
我们提出了一种方法，通过测量微悬臂梁振动谱中的多个三维模式，以提高灵敏度检测偏心附着在微悬臂梁上的目标质量粒子。频谱中的峰值揭示了弯曲、扭转和横向运动之间的复杂耦合，详细的有限元模型有助于解释它们。扭转模态和横向模态频率的质量灵敏度比传统的基本弯曲模态高一个数量级，其Q因子显著高于传统的弯曲模态。这些模式在现有的微悬臂技术范围内提供了显著增强的质量传感能力。(C) 2004年美国物理研究所。
We present a method to detect, with enhanced sensitivity, a target mass particle attached eccentrically to a microcantilever by measuring multiple three-dimensional modes in the microcantilever vibration spectrum. Peaks in the spectrum reveal a complex coupling between the bending, torsional, and lateral motions and detailed finite element models assist in their interpretation. The mass sensitivities of the torsional and lateral mode frequencies are an order of magnitude greater, and their Q factors significantly higher, than that of the conventionally used fundamental bending mode. These modes offer significantly enhanced mass sensing capabilities within the realm of existing microcantilever technology. (C) 2004 American Institute of Physics.