Dual-axis MEMS mirror for large deflection-angle using SU-8 soft torsion beam
Dual-axis MEMS mirror for large deflection-angle using SU-8 soft torsion beam
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DOI：
10.1016/j.sna.2005.01.029
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发表时间：
2005-05-31
影响因子：
4.6
通讯作者：
Takayama, Y
中科院分区：
文献类型：
--
作者：
Fujita, T;Maenaka, K;Takayama, Y
提出了一种具有双框架结构的双轴MEMS电流镜的设计方法、制作工艺和性能表征。为了在较小的驱动功率下获得较大的偏转角，该装置采用SU-8光敏环氧树脂制作柔性扭转梁。在本文中，我们提出的特点，内，外镜的动态和静态操作，以及测试结果的稳定性。对于所施加的静态电流，反射镜的倾斜角约为0.1度/mA。共振操作时的最大偏转角测量值超过+/- 40度。(c)2005 Elsevier B. V.保留所有权利。
We present design methodology, fabrication process and characterization of a dual-axis MEMS galvano-mirror with double gimbal structure. In the device, soft torsion beams are made of the photosensitive epoxy resin, SU-8, in order to obtain large-deflection angle for small driving power. In this paper, we present characteristics of the inner and outer mirrors for dynamic and static operation, and also test results for stability. The tilt angle of the mirror for applied static current is about 0.1 degrees/mA. Maximum deflection angle at resonant operation was measured to be over than +/- 40 degrees. (c) 2005 Elsevier B.V. All rights reserved.