Chemically Polished Aluminum Alloys with Low Outgassing Rate
Chemically Polished Aluminum Alloys with Low Outgassing Rate
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低释气率化学抛光铝合金
DOI：
10.3131/jvsj.41.574
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发表时间：
1998
期刊：
影响因子：
--
通讯作者：
M. Kanazawa
中科院分区：
文献类型：
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作者：
S. Inayoshi;Kazuya Saito;S. Tsukahara;K. Ishizawa;T. Nomura;M. Kanazawa
针对真空和极高真空设备中常用的铝合金构件材料，发展了一种化学抛光及后续清洗的表面处理工艺。本文重点介绍了最常用的合金A5052和A6061。新技术处理的表面足够光滑，可以清晰地反射。通过热脱附光谱、抽气特性和俄歇电子能谱、原子力显微镜、Brunauer-Emmett-Teller方法和湿度箱测试对化学抛光样品进行了表面分析。化学抛光的样品的放气速率在机械加工的铝合金的最低值范围内。化学抛光样品的耐大气腐蚀性能优于任何机械加工样品，经过特殊处理的化学抛光样品比电解抛光样品具有更高的耐腐蚀性能。
A technique of chemical polishing and subsequent cleaning was developed as the final surface treatment of most of aluminum alloys those are used as component materials in ultrahigh and extremely high vacuum equipments. This paper focuses to most recurrently used alloys, A5052 and A6061. Surfaces treated by the new technique are smooth enough to give a clear reflection. The outgassing properties by thermal desorption spectroscopy, pump-down characteristics, and surface analyses by Auger electron spectroscopy, atomic force microscopy, Brunauer-Emmett-Teller method, and humidity cabinet test were examined on the chemically polished samples. The outgassing rate of the chemically polished samples is in the lowest range of value to those reported for mechanically machined aluminum alloys. The atmospheric corrosion resistance of chemically polished samples is better than that of any mechanically machined samples, and the specially treated chemically polished samples has higher corrosion resistance than the electrolytically polished samples.