Breaking the 10 nm barrier in hard-X-ray focusing
Breaking the 10 nm barrier in hard-X-ray focusing
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DOI：
10.1038/nphys1457
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发表时间：
2010-02-01
期刊：
影响因子：
19.6
通讯作者：
Yamauchi, Kazuto
中科院分区：
文献类型：
--
作者：
Mimura, Hidekazu;Handa, Soichiro;Yamauchi, Kazuto
硬X射线具有特殊的性质，可用于物质的化学，元素和结构分析。虽然在各种硬X射线分析方法中，单纳米分辨率在理论上是可能的，但聚焦光学器件的制造仍然是主要障碍。由于光学系统中的缺陷引起的像差使聚焦光束（1）的质量劣化。在这里，我们描述了一种原位波前校正方法，以克服这一点，并证明了X射线束在一个方向上集中在20千电子伏的宽度为7纳米。我们实现了由横向梯度多层镜产生的X射线纳米束的焦斑改善（2）。掠入射变形镜（3）用于恢复波前形状。使用该系统，即使硬X射线聚焦元件没有实现足够的性能，也可以实现理想的聚焦条件。据信，这将最终导致X射线分析方法中的单纳米空间分辨率。
Hard X-rays have exceptional properties that are useful in the chemical, elemental and structure analysis of matter. Although single-nanometre resolutions in various hard-X-ray analytical methods are theoretically possible with a focused hard-X-ray beam, fabrication of the focusing optics remains the main hurdle. Aberrations owing to imperfections in the optical system degrade the quality of the focused beam(1). Here, we describe an in situ wavefront-correction approach to overcome this and demonstrate an X-ray beam focused in one direction to a width of 7 nm at 20 keV. We achieved focal spot improvement of the X-ray nanobeam produced by a laterally graded multilayer mirror(2). A grazing-incidence deformable mirror(3) was used to restore the wavefront shape. Using this system, ideal focusing conditions are achievable even if hard-X-ray focusing elements do not achieve sufficient performance. It is believed that this will ultimately lead to single-nanometre spatial resolution in X-ray analytical methods.