Spatiotemporal optical emission spectroscopy to estimate electron density and temperature of plasmas in solution
Spatiotemporal optical emission spectroscopy to estimate electron density and temperature of plasmas in solution
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DOI：
10.1088/1361-6463/ab78d5
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发表时间：
2020-06-03
影响因子：
3.4
通讯作者：
Terashima, Kazuo
中科院分区：
文献类型：
--
作者：
Inoue, Kenichi;Takahashi, Shion;Terashima, Kazuo
在本文中，我们讨论溶液中等离子体的电子密度和温度，它们为加工产生了有吸引力的反应场。使用时空分辨光学发射光谱法进行了 NaCl 溶液中等离子体的电子密度的测量和电子温度的估计。电子密度估计为 1016 cm-3(β) 线的量级。根据电子中性轫致辐射，等离子体的电子温度估计在 0.2-1.4 eV 范围内。证实估计值与玻尔兹曼方程假设下电压和电流密度的实验值一致。
In this article, we discuss the electron density and the temperature of plasmas in solution, which produce an attractive reaction field for processing. The measurement of the electron density and the estimation of the electron temperature of the plasma in NaCl solution were performed using spatiotemporally resolved optical emission spectroscopy. The electron densities were estimated to be of the order of 1016 cm-3(beta) line. The electron temperatures of the plasma were estimated to be in the range of 0.2-1.4 eV based on the electron-neutral bremsstrahlung. The estimated values were confirmed to be consistent with the experimental values of voltage and current density in the assumption of the Boltzmann equation.