Effect of focus position on informational properties of acoustic emission generated by laser-material interactions
Effect of focus position on informational properties of acoustic emission generated by laser-material interactions
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DOI：
10.1016/j.apsusc.2006.01.047
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发表时间：
2006-11-30
影响因子：
6.7
通讯作者：
Nikumb, Suwas K.
中科院分区：
文献类型：
--
作者：
Bordatchev, Evgueni V.;Nikumb, Suwas K.
为了在激光材料去除过程中达到所需的精度、精度和表面粗糙度，需要对与激光、光学、工件材料及其运动相关的工艺参数进行监测和控制。定义为聚焦透镜和样品工件表面之间的间隙的焦点位置是最关键的工艺参数之一，其决定了激光束强度在待烧蚀表面上的投影，因此直接影响所去除材料的体积和几何形状，并由此影响加工质量。本文对激光与材料相互作用产生的声发射（AE）随聚焦位置的变化进行了统计分析。该研究涉及在线测量的AE信号从激光材料相互作用区作为焦点位置和加工沟槽的宽度的函数。分析了几个基本的统计参数，如平均幅度，方差和功率谱密度，以选择不同的信息参数。基于20-180、180-300和300-500 kHz的频率突变内的方差的三个信息参数的模式识别分析用于加工沟槽的焦点位置和宽度的可靠分类。研究结果为今后激光材料去除过程在线监测与控制系统的发展提供了重要的参考。皇冠版权所有（c）2006年出版的爱思唯尔B. V.保留所有权利。
To achieve desired accuracy, precision and surface roughness during laser-material removal process, monitoring and control of the process parameters related to laser, optics, workpiece material and its motion are required. Focus position, defined as a gap between the focusing lens and the surface of the sample workpiece, is one of the most critical process parameters, which determines the projection of the intensity of the laser beam on the surface to be ablated and therefore directly affects volume and geometry of the material removed and there by machining quality. In this paper, acoustic emission (AE) generated by laser-material interactions was statistically analyzed with respect to the variations in the focus position. The study involved on-line measurements of the AE signal from the laser-material interaction zone as a function of the focus position and the width of the machined trenches. Several basic statistical parameters, e.g. average amplitude, variance and power spectrum density were analyzed to select distinct informational parameters. Pattern recognition analysis of three informational parameters based on variances within frequency diapasons of 20-180, 180-300, and 300-500 kHz was used for reliable classification of the focus position and width of the machined trenches. The results provide important information for future development of on-line monitoring and control systems for laser-material removal process. Crown Copyright (c) 2006 Published by Elsevier B.V. All rights reserved.