Relationship between the structure and electrical characteristics of diamond-like carbon films
Relationship between the structure and electrical characteristics of diamond-like carbon films
复制标题
DOI：
10.1063/1.4894626
复制
发表时间：
2014-09
影响因子：
3.2
通讯作者：
Radek Ješko
中科院分区：
文献类型：
--
作者：
Radek Ješko
为了研究类金刚石薄膜的结构与电学特性之间的关系，在氩气/甲烷气氛中，利用光电子辅助辉光放电制备了类金刚石薄膜。薄膜的介电常数和击穿强度表现出相反的行为，这取决于在合成过程中的总压力。这两个值的乘积随着压力的增加而单调下降。拉曼光谱用Voigt型公式分析。在此基础上，提出了DLC结构的“sp2簇模型”。该模型由sp2碳，sp3碳和氢的介电基质海洋包围的sp2碳的导电簇组成，并表明整个DLC膜的介电常数由基质的介电常数和簇的总尺寸之间的平衡决定，而击穿强度由簇尺寸的倒数决定。T...
To elucidate the relationship between the structure and the electrical characteristics of diamond-like carbon (DLC) films, DLC films were synthesized in a well-controlled glow discharge with the aid of photoelectrons in an argon/methane atmosphere. The dielectric constant and breakdown strength of the films exhibited opposite behaviors, depending on the total pressure during the synthesis. The product of these two values decreased monotonically as the pressure increased. The Raman spectra were analyzed with a Voigt-type formula. Based on the results, the authors propose the “sp2 cluster model” for the DLC structure. This model consists of conductive clusters of sp2 carbons surrounded by a dielectric matrix sea of sp2 carbon, sp3 carbon, and hydrogen, and indicates that the dielectric constant of the whole DLC film is determined by the balance between the dielectric constant of the matrix and the total size of the clusters, while the breakdown strength is determined by the reciprocal of the cluster size. T...