T.Ohmi: "High quality metallization by ion bombardment having precisely controlled energy," Dig. Tech. Papers, 1989 2nd MicroProcess Conf., pp.112-115, Kobe, July(1989).
T.Ohmi: "High quality metallization by ion bombardment having precisely controlled energy," Dig. Tech. Papers, 1989 2nd MicroProcess Conf., pp.112-115, Kobe, July(1989).
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T.Ohmi：“通过具有精确控制能量的离子轰击实现高质量金属化，”Dig。
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