Directional acoustic response of a silicon disc-based microelectromechanical systems structure
Directional acoustic response of a silicon disc-based microelectromechanical systems structure
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DOI：
10.1049/mnl.2013.0677
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发表时间：
2014-04-01
影响因子：
1.3
通讯作者：
Windmill, James Frederick Charles
中科院分区：
文献类型：
--
作者：
Mackie, David James;Jackson, Joseph Curt;Windmill, James Frederick Charles
提出了一种基于微机电系统（MEMS）的结构，能够作为定向声学传感器进行机械操作。该结构通过商用 SOIMUMPS 铸造工艺制造，由两个圆盘组成，圆盘连接到中央悬梁，两端固定。该结构的设计类似于其他定向 MEMS 麦克风，模仿寄生蝇 Ormia ochracea 的定向听觉器官。使用激光多普勒振动测量和有限元建模进行模态分析和机械声学方向性分析已经实现。事实证明，这种耦合的 MEMS 结构表现出声学方向响应，两个耦合圆盘的相对振动幅度与声音角度之间存在一对一的关系，从 -75 度到 +60 度。
A microelectromechanical systems (MEMS)-based structure capable of operating mechanically as a directional acoustical sensor is presented. The structure, fabricated through the commercially available SOIMUMPS foundry process, consists of two circular discs attached to a central suspension beam, fixed at both ends. The design of the structure resembles other directional MEMS microphones that mimic the directional hearing organ of the parasitoid fly, Ormia ochracea. Modal analysis and mechanical acoustic directionality analysis using both laser Doppler vibrometry and finite element modelling have been implemented. It is demonstrated that this coupled MEMS structure exhibits an acoustic directional response, with a one-to-one relationship between the relative vibration amplitudes of the two coupled discs and the angle of sound, from -75 degrees to +60 degrees.