A systematic characterization method for gravity-feed micro-hole drilling in glass with spark assisted chemical engraving (SACE)
A systematic characterization method for gravity-feed micro-hole drilling in glass with spark assisted chemical engraving (SACE)
复制标题
利用火花辅助化学雕刻 (SACE) 在玻璃上进行重力进给微孔钻孔的系统表征方法
DOI：
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
H. Bleuler
中科院分区：
文献类型：
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作者：
R. Wüthrich;U. Spaelter;Y. Wu;H. Bleuler
重力进给钻削是电火花辅助化学雕刻（SACE）在玻璃中钻削微孔最常用的方法。本文提出了一种方法，允许这种钻井方法的系统表征。研究了电压、刀具形状和切削力等因素的影响。结果表明，SACE重力进给钻进随钻进深度的不同，呈现出两种不同的钻进状态。在前200-300 µm期间，由气膜内放电次数控制的放电状态允许快速钻孔（高达约100 µm s−1）。对于更深的深度，钻孔由流体动力学机制控制，其中钻孔速度受到微孔内电解质流动的限制，导致通常10 µm s−1的缓慢钻孔。此外，它示出了如何的气膜建立时间限制钻井速度。
Gravity-feed drilling is the most commonly used method for micro-hole drilling in glass with spark assisted chemical engraving (SACE). This paper proposes a method allowing the systematic characterization of this drilling method. The influences of voltage, tool shape and force are investigated. It is found that SACE gravity-feed drilling shows two regimes depending on the drilling depth. During the first 200–300 µm, the discharge regime, controlled by the number of discharges inside the gas film, allows fast drilling (up to about 100 µm s−1). For deeper depths, the drilling is controlled by the hydrodynamic regime in which the drilling speed is limited by the flow of the electrolyte inside the micro-hole resulting in slow drilling of typically 10 µm s−1. Furthermore, it is shown how the gas film build-up time is limiting the drilling speed.