Preparation of H-terminated and aminated diamond like carbon surfaces

Preparation of H-terminated and aminated diamond like carbon surfaces
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H 封端和胺化类金刚石碳表面的制备

DOI:
10.1007/s12598-012-0489-4
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发表时间:
2012-03
期刊:
影响因子:
8.8
通讯作者:
Li MS
Li MS
中科院分区:
材料科学1区
文献类型:
--
作者:
Wang M;Wang WC;Huang YJ;Li MS

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采用射频磁控等离子体增强化学气相沉积(PECVD)技术,以乙炔(C4H10)为碳源,在SiO2衬底上制备了H端类金刚石薄膜。用拉曼光谱、扫描电子显微镜(SEM)和原子力显微镜(AFM)对沉积态DLC膜进行了表征。通过将光化学氧化的DLC表面暴露于硅烷试剂,进一步研究了所获得的DLC表面的化学反应性。使用水接触角和X射线光电子能谱法跟踪反应过程。
H-terminated DLC layers were synthesized on SiO2substrate by radio frequency (RF) magnetron plasma-enhanced chemical vapor deposition (PECVD) in a conventional reactor using C4H10as carbon source. As-deposited DLC films were characterized by Raman spectroscopy, scanning electron microscopy (SEM) as well as atomic force microscopy (AFM). The chemical reactivity of the obtained DLC surface was further investigated by exposing the photochemically oxidized DLC surface to a silane reagent. The course of the reaction was followed using water contact angle and X-ray photoelectron spectroscopy.
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