Nearly diffraction-limited line focusing of a hard-X-ray beam with an elliptically figured mirror.
Nearly diffraction-limited line focusing of a hard-X-ray beam with an elliptically figured mirror.
复制标题
使用椭圆形镜对硬 X 射线束进行近乎衍射极限的线聚焦。
DOI：
10.1107/s0909049502012578
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发表时间：
2002
影响因子：
2.5
通讯作者：
Y. Mori
中科院分区：
文献类型：
--
作者：
K. Yamauchi;K. Yamamura;H. Mimura;Y. Sano;A. Saito;A. Souvorov;M. Yabashi;K. Tamasaku;T. Ishikawa;Y. Mori
采用弹性发射加工和等离子体化学蒸发加工两种新的加工方法，研制了一种用于X射线微聚焦的椭圆镜。使用拼接干涉测量法测量的表面轮廓显示出在7 nm峰谷的理想图形周围的最大偏差。该反射镜显示出几乎衍射极限的聚焦性能，在焦点处具有200 nm的线宽。波光学计算，考虑到测量的表面轮廓，再现以及测量的聚焦特性在束腰和周围。
An elliptical mirror for X-ray microfocusing was manufactured using the new fabrication methods of elastic emission machining and plasma chemical vaporization machining. Surface profiles measured using stitching interferometry showed a maximum deviation around the ideal figure of 7 nm peak-to-valley. The mirror showed nearly diffraction-limited focusing performance, with a 200 nm line width at the focus. Wave-optical calculations, taking the measured surface profile into consideration, reproduced well the measured focusing properties both at and around the beam waist.