Observation of acoustoelectric effect in micromachined lamb wave delay lines with AlGaN/GaN heterostructure
Observation of acoustoelectric effect in micromachined lamb wave delay lines with AlGaN/GaN heterostructure
复制标题
AlGaN/GaN 异质结构微机械兰姆波延迟线的声电效应观察
DOI:
10.1109/iedm.2016.7838487
复制
发表时间:
2016
期刊:
影响因子:
--
通讯作者:
M. Rais
中科院分区:
文献类型:
--
作者:
H. Zhu;A. Ansari;W. Luo;M. Rais
We report on the first time observation of acoustoelectric (AE) effect from the interaction of acoustic Lamb waves and two-dimensional electron gas (2DEG) in an AlGaN/GaN heterostructure. Micro-fabricated Lamb wave delay lines are used to launch and guide travelling acoustic waves through the 2DEG region, resulting in a DC current flow between two ohmic contacts positioned on the delay line. The Lamb wave delay line shows much better acoustic transmission efficiency than the conventional surface acoustic wave (SAW) counterpart. The dependence of AE current on RF power and frequency is also verified.