Industrial developments of scientific insights in dusty plasmas
Industrial developments of scientific insights in dusty plasmas
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DOI：
10.1088/0963-0252/11/3a/332
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发表时间：
2002-08
影响因子：
3.8
通讯作者：
L. Boufendi;A. Bouchoule
中科院分区：
文献类型：
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作者：
L. Boufendi;A. Bouchoule
在过去的十二年里，对尘埃等离子体的研究首先是为了了解低压等离子体工具和表面加工技术中尘埃引起的问题。与此同时，尘埃等离子体的物理和化学研究也带来了一个令人着迷的领域。尘埃等离子体获得的科学知识，导致新的想法的应用程序，这方面的贡献的目的是目前的例子，这种连接。对这一问题进行详尽的审查显然是不可能的，只强调了三个方面。第一个关注的是等离子体中纳米尺寸的颗粒生长和它们用于沉积具有新特性的薄膜。第二个问题涉及的情况下，大量的灰尘是存储在放电，诱导高电子能量，对等离子体化学的强烈影响。最后，最后一个将涉及众所周知的尘埃粒子的静电鞘的约束和它的实际或潜在的应用的一些例子。
In the last twelve years the research on dusty plasmas was at first required to understand the dust-induced problems in low-pressure plasma tools and surface processing technologies. Meanwhile, the research on physics and chemistry of dusty plasmas led to the discovery of a fascinating domain. The scientific knowledge acquired on dusty plasmas leads to new ideas for applications and the aim of this contribution is to present examples of such connections. An exhaustive review of the matter would be clearly impossible and only three aspects are emphasized. The first concerns plasmas where nanosized particles are grown and their use for deposition of thin films with new properties. The second concerns situations where a significant amount of dust is stored in a discharge, inducing high electron energies, with strong impact on plasma chemistries. Finally, the last one will concern the well-known confinement of dust particles by electrostatic sheaths and some examples of its actual or potential applications.