Power MEMS - A capacitive vibration-to-electrical energy converter with built-in voltage
Power MEMS - A capacitive vibration-to-electrical energy converter with built-in voltage
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DOI：
10.1016/j.sna.2007.02.036
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发表时间：
2008-03-10
影响因子：
4.6
通讯作者：
Seidel, Helmut
中科院分区：
文献类型：
--
作者：
Kuehne, Ingo;Frey, Alexander;Seidel, Helmut
本文报道了一种电容式振动-电能转换器的设计与分析。提出了一种基于状态空间方程的平行板静电弹簧-质量系统的理论设计模型。并联极板电容器的充电是通过对电极使用具有不同功函数的材料来实现的。为了优化设计参数，以最大输出功率为目标，进行了数值模拟。所示的基于微机电系统（MEMS）的电容式能量转换器能够在频率为1 kHz、幅度为1.96 m/s(2) （0.2 g）的外部振动下提供4.28 μ W的输出功率。本文还介绍了一种用于存储电能的基本电子电路。并给出了微机电系统的设计方案和工艺流程。(C) 2007 Elsevier B.V.版权所有
This paper reports on the design and analysis of a capacitive vibration-to-electrical energy converter. A theoretical design model of a parallel-plate electrostatic spring-mass-system is presented, based on state space equations. The charging of the parallel-plate capacitor takes place by utilizing materials with different work functions for the electrodes. Numerical simulations are performed in order to optimize design parameters targeting a maximum output power. The shown Micro-Electro-Mechanical System (MEMS) based capacitive energy converter is able to provide an output power of 4.28 mu W at an external vibration with a frequency of 1 kHz and an amplitude of 1.96 m/s(2) (0.2 g). A basic electronic circuit for storing the electrical energy is also introduced. Furthermore, a MEMS design and a process flow are presented. (C) 2007 Elsevier B.V. All rights reserved.