A quality controlled laser-chemical process for micro metal machining
A quality controlled laser-chemical process for micro metal machining
复制标题
用于微金属加工的质量控制激光化学工艺
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
G. Goch
中科院分区：
文献类型：
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作者：
Peiran Zhang;G. Goch
摘要激光化学加工结合了激光烧蚀和电化学加工的优点，用于生产自由曲面微成形工具。所需的几何图形由一系列具有不同横截面的重叠移除路径产生。针对该工艺对几何精度和表面粗糙度要求较高的特点，建立了三级质量控制体系。基于去除轮廓与工艺参数之间的因果关系分析，后处理控制器设计了去除路径的位置和截面。利用现场质量控制回路，可以通过使用状态观测器和干涉仪来补偿沿进给方向与所需去除轮廓的偏差。在过程内级别，实时观察和控制所需的过程参数。
AbstractA laser-chemical process combines advantages of both laser ablation and electro-chemical machining and is used to produce free form micro forming tools. The desired geometry results from a sequence of overlapping removal paths with different cross section. Due to the high requirements of geometry accuracy and surface roughness, a three-level quality control system is developed for this process. Based on causal analysis between removal profile and process parameters a post-process controller designs the position and cross section for the removal paths. With an in situ quality control loop the deviation from the desired removal profile along the feed direction could be compensated by using a state observer and an interferometer. At an in-process level the required process parameters are real time observed and controlled.