Novel polymer systems for deep UV microlens arrays
Novel polymer systems for deep UV microlens arrays
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用于深紫外微透镜阵列的新型聚合物系统
DOI：
10.1088/0022-3727/41/9/094007
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
D. Bradley
中科院分区：
文献类型：
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作者：
A. Mackintosh;A. Kuehne;R. Pethrick;B. Guilhabert;E. Gu;C. L. Lee;M. Dawson;G. Heliotis;D. Bradley
我们首次报道了一种有效透光率低于300 nm的紫外光固化聚合物。通过仔细控制动力学，可以通过旋涂产生各种粘度以优化成膜性能。的单体和薄膜的透射率进行了研究，在光谱范围内，跨越240-370 nm的紫外AlInGaN发光二极管的输出。通过椭圆偏振法测量聚合物的折射率，在280 nm处的值为1.57。使用标准光刻技术与反应离子蚀刻，微透镜阵列已在这种聚合物中制造，直径为30微米及以下，并通过原子力显微镜和共聚焦显微镜进行表征。
We report for the first time a UV curable polymer with effective optical transmission below 300 nm. Through careful control of kinetics, various viscosities can be generated to optimize the film forming properties via spin coating. The transmission of the monomers and films is investigated over a spectral range which spans the 240–370 nm output of ultraviolet AlInGaN light-emitting diodes. The refractive index of the polymer has been measured by ellipsometry to give a value of 1.57 at 280 nm. Using standard lithography techniques with reactive ion etching, arrays of microlenses have been fabricated in this polymer with diameters of 30 µm and below and are characterized by atomic force microscopy and confocal microscopy.