Development of microelectrodes for electrochemical micromachining
Development of microelectrodes for electrochemical micromachining
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DOI：
10.1007/s00170-010-3035-2
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发表时间：
2011-07
期刊：
影响因子：
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通讯作者：
Y. Liu;Di Zhu;Y. Zeng;H. Yu
中科院分区：
文献类型：
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作者：
Y. Liu;Di Zhu;Y. Zeng;H. Yu
近年来，电化学微加工在微细加工中发挥着越来越重要的作用。微电极作为电磁加工的工具，是加工过程中必不可少的单元。在本研究中，通过不同的加工工艺制备了不同端面形状的微电极。首先，研究了不同端面形状的微电极成形方法，如电化学刻蚀、单次放电、电化学微加工等。其次，对上述不同端面形状的微电极进行了模拟、分析，并将其应用于EMM工艺中。最后，利用上述三种微电极在金属材料上加工出直径小于10μm的微孔阵列、3个无锥度的微孔和三维微结构。
Electrochemical micromachining (EMM) has become more and more important in micro machining in recent years. Microelectrode as the tool of EMM is an essential cell in the machining process. In this study, microelectrodes with various end shapes are fabricated by different processing techniques. First, the different end shape forming methods for microelectrode, such as electrochemical etching, single electric discharge, and electrochemical micromachining are investigated. Second, microelectrodes with various end shapes fabricated above are simulated, analyzed, and then used in EMM process. At last, micro holes array with diameter of less than 10 μm, three micro holes with no taper and a 3D microstructure are machined on metallic materials by above three types of microelectrodes.