Full MEMS monolithic microcolumn for wafer-level arrayal
Full MEMS monolithic microcolumn for wafer-level arrayal
复制标题
用于晶圆级阵列的全 MEMS 单片微柱
DOI：
10.1116/1.1824952
复制
发表时间：
2004
影响因子：
1.4
通讯作者：
K. Chun
中科院分区：
文献类型：
--
作者：
H. Kim;Changho Han;Jinkwang Kim;Ho;K. Chun
最近，一种先进的微柱概念被提出，以提高吞吐量。然而，由于方法的复杂性，小型化受到了限制。此外，微柱必须在超高真空条件下运行，才能在场发射尖端获得稳定的电子发射。信号线和电源线都需要通过超高真空室连接。因此，微柱阵列数量的增加需要从外部控制单元到内部单元的更多布线，并且布线的数量可能变得令人望而却步。为了解决这一问题，人们提出了一种新的概念，即利用微电子机械系统(MEMS)技术开发阵列式微柱。本文描述了一种整体式(3×3阵列)微柱，它由冷场发射尖端、输入透镜、棱镜和用于多阵列微柱的新型偏转器组成。我们还介绍了它的制造工艺，它依赖于改进的微细加工和制造工艺。
Recently, an advanced microcolumn concept for improved throughput was proposed. However, due to the complexity of the approach, the miniaturization was limited. In addition, microcolumns must run under ultrahigh vacuum conditions in order to obtain stable electron emission at the field-emission tip. Both signal and power lines need to be connected through the ultrahigh vacuum chamber. Therefore, increases in the number of microcolumn arrays necessitate more wiring from the external control unit to the internal units, and the number of wires can become prohibitive. To solve this problem, a new concept, exploiting the possibility of an arrayed microcolumn which uses microelectromechanical systems (MEMS) technology has been developed. This paper describes a monolithic (3×3 arrayed) microcolumn, which consists of a cold field-emission tip, an input lens, an einzel lens, and novel deflectors for multiple-arrayed microcolumns. We also describe its fabrication process, which relies on improved microfabrication a...