Wide-Angle Broadband Antireflection Coatings Prepared by Atomic Layer Deposition
Wide-Angle Broadband Antireflection Coatings Prepared by Atomic Layer Deposition
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DOI：
10.1021/acsami.9b03125
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发表时间：
2019-06-19
影响因子：
9.5
通讯作者：
Szeghalmi, Adriana
中科院分区：
文献类型：
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作者：
Pfeiffer, Kristin;Ghazaryan, Lilit;Szeghalmi, Adriana
提出了一种具有超低残余反射率的新型宽带减反射涂层，适用于光入射角从0°到60°。该体系由原子层沉积（ALD）制备的干涉多层涂层与原子混合SiO2/Al2O3 ALD复合材料湿化学蚀刻获得的低氮纳米孔SiO2顶层组成。在400 ~ 1100 nm的宽光谱范围内，双面镀膜B270玻璃基板的平均剩余反射率仅为0.5%。在420 ~ 680 nm可见光谱范围内，当斜入射角（AOI）为45°和60°时，基片前后侧的平均反射率分别从9.9和15.8降低到0.4和1.8%。在400 ~ 950 nm光谱范围内，AOI 6度处测得的平均透过率达到99.5%。制备后三周的测量显示，在550纳米的光谱范围内，平均透射率仅下降了99.3%。10个月后，平均透光率仍为99.0%，因此样品处理可能也影响了性能。混合ALD系统在直径为50 mm、高度为25 mm的强弯曲B270非球面透镜上具有良好的保形增强现实性能。该工艺是在复杂3D光学器件上实现全方位增强现实涂层的一条有前途的途径，这对消费级和高性能光学系统越来越重要。
A novel broadband antireflective coating with ultra-low residual reflectance for light incidence angles from 0 degrees up to 60 degrees is presented. The system consists of an interference multilayer coating made by atomic layer deposition (ALD) combined with a low-n nanoporous SiO2 top-layer obtained by wet-chemical etching of an atomically mixed SiO2/Al2O3 ALD composite. The average residual reflectance measured at normal incidence for double-sided coated B270 glass substrates is only 0.5% in a broad spectral range from 400 to 1100 nm. The average reflectance of the substrate considering both front and rear sides decreased in the visible spectral range of 420-680 nm from 9.9 and 15.8 to 0.4 and 1.8% at an oblique angle of incidence (AOI) of 45 degrees and 60 degrees, respectively, by applying the hybrid ALD antireflection coatings. The measured average transmittance reaches 99.5% at AOI 6 degrees in the 400-950 nm spectral range. Measurements three weeks after preparation show only a small reduction of the average transmittance to 99.3% in this spectral range spanning 550 nm. Ten months later, the average transmittance is still 99.0%, whereby the sample handling might have also affected the performance. The hybrid ALD system shows excellent conformal AR performance on a strongly curved B270 aspheric lens with a diameter of 50 mm and a height of 25 mm. The presented process is a promising route toward omnidirectional AR coatings on complex 3D optics, which are increasingly important for consumer and high-performance optical systems.