Silvaco ATLAS model of ESA's Gaia satellite e2v CCD91-72 pixels
Silvaco ATLAS model of ESA's Gaia satellite e2v CCD91-72 pixels
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ESA Gaia 卫星的 Silvaco ATLAS 模型 e2v CCD91-72 像素
DOI：
10.1117/12.856958
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发表时间：
2010
影响因子：
1.3
通讯作者：
M. Robbins
中科院分区：
文献类型：
--
作者：
G. Seabroke;A. Holland;D. Burt;M. Robbins
盖亚卫星是欧空局的一项高精度天体测量、光度测量和光谱学基石使命，目前定于2012年发射。它的主要科学驱动力是银河系的组成，形成和演化。Gaia将通过详细的校准和校正CCD辐射损伤和CCD几何失真来达到前所未有的精度要求。本文是该系列的第三篇，我们展示了Gaia e2 v CCD 91 -72像素的3D Silvaco ATLAS模型。我们发布了e2 v的设计模型预测的能力之一，盖亚的像素功能，补充掩埋通道（SBC），第一次。Kohley等人（2009年）测量了Gaia CCD的SBC容量，比e2 v的设计小一个数量级。我们已经找到了产生这些测量的SBC容量的SBC掺杂宽度。宽度与标称宽度有2 μm的系统偏移。这些偏移似乎是e2 v光刻中未校准的系统偏移，这可能是由于系统针脚对准偏移或横向ABD屏蔽掺杂扩散。SBC容量的范围用于推导拼接块内两个像素特征之间的最差情况随机拼接误差为±0.25 μm，这不能解释系统偏移。提供SBC容量范围的制造原因超出了我们的像素模型的范围，因此它不允许我们预测测试CCD的代表性。这个悬而未决的问题对盖亚的辐射损伤和几何校准模型有影响。
The Gaia satellite is a high-precision astrometry, photometry and spectroscopic ESA cornerstone mission, currently scheduled for launch in 2012. Its primary science drivers are the composition, formation and evolution of the Galaxy. Gaia will achieve its unprecedented accuracy requirements with detailed calibration and correction for CCD radiation damage and CCD geometric distortion. In this paper, the third of the series, we present our 3D Silvaco ATLAS model of the Gaia e2v CCD91-72 pixel. We publish e2v's design model predictions for the capacities of one of Gaia's pixel features, the supplementary buried channel (SBC), for the first time. Kohley et al. (2009) measured the SBC capacities of a Gaia CCD to be an order of magnitude smaller than e2v's design. We have found the SBC doping widths that yield these measured SBC capacities. The widths are systematically 2 μm offset to the nominal widths. These offsets appear to be uncalibrated systematic offsets in e2v photolithography, which could either be due to systematic stitch alignment offsets or lateral ABD shield doping diffusion. The range of SBC capacities were used to derive the worst-case random stitch error between two pixel features within a stitch block to be ±0.25 μm, which cannot explain the systematic offsets. It is beyond the scope of our pixel model to provide the manufacturing reason for the range of SBC capacities, so it does not allow us to predict how representative the tested CCD is. This open question has implications for Gaia's radiation damage and geometric calibration models.