T.Hoshino, M.Hata, S.Neya, Y.Nishioka, T.Watanabe, K.Tatsumura, I.Ohdomari: "Simulation Program for the Silicon Oxidation Process"Extended Abstracts of Workshop on Formation, Characterization, and Reliability of Ultrathin Silicon Oxides. 8. 279-284 (2003)
T.Hoshino, M.Hata, S.Neya, Y.Nishioka, T.Watanabe, K.Tatsumura, I.Ohdomari: "Simulation Program for the Silicon Oxidation Process"Extended Abstracts of Workshop on Formation, Characterization, and Reliability of Ultrathin Silicon Oxides. 8. 279-284 (2003)
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T.Hoshino, M.Hata, S.Neya, Y.Nishioka, T.Watanabe, K.Tatsumura, I.Ohdomari:“硅氧化过程的模拟程序”超薄形成、表征和可靠性研讨会的扩展摘要
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