Particulate reduction in PLD-grown crystalline films via bi-directional target irradiation
Particulate reduction in PLD-grown crystalline films via bi-directional target irradiation
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DOI：
10.1007/s00339-019-2456-5
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发表时间：
2019-02
期刊：
影响因子：
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通讯作者：
J. Prentice;J. Grant-Jacob;S. Kurilchik;J. Mackenzie;R. Eason
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作者：
J. Prentice;J. Grant-Jacob;S. Kurilchik;J. Mackenzie;R. Eason
我们提出了一种新的变化的脉冲激光沉积（PLD）技术，旨在减少产生的颗粒的数量，从而在所得的晶体波导中观察到的线性传播损耗。该方法依赖于将系统配置为有效地提供双向烧蚀，由此固定脉冲激光束相对于目标表面的入射角根据目标的旋转角和位置而改变符号。这种交替的烧蚀方向旨在减少不期望的周期性表面结构（例如定向锥体）的积累，所述不期望的周期性表面结构被认为是生长膜内的微粒的主要来源，同时保持羽流相对于基板静止。我们发现，使用这种技术烧蚀的目标具有较少的方向性结构和降低的表面粗糙度。此外，使用PLD生长的Y3 Ga 5 O 12作为范例晶体膜，我们比较了单向和双向烧蚀的生长，并证明通过后者的平均波导传播损耗从~ 0.9 dB/cm降低到~ 0.23 dB/cm。
We present a novel variation of the pulsed laser deposition (PLD) technique, aimed at reducing the number of particulates produced and consequently the linear propagation loss observed in the resulting crystal waveguides. The approach relies upon configuring the system to effectively provide bi-directional ablation, whereby the incidence angle of the fixed pulsed laser beam with respect to the target surface changes sign, depending upon the rotation angle and position of the target. Such an alternating ablation direction is intended to reduce the buildup of undesirable periodic surface structures, such as directional cones, believed to be a major source of particulates within the growing film while keeping the plume stationary with respect to the substrate. We show that targets ablated using this technique have fewer directional structures and a decreased surface roughness. Furthermore, using PLD-grown Y3Ga5O12as the exemplar crystal film, we compare growths with uni- and bi-directional ablation and demonstrate reduction from ~ 0.9 to ~ 0.23 dB/cm in the average waveguide propagation losses via the latter.