Controlling Stiction in Nano-Electro-Mechanical Systems Using Liquid Crystals
Controlling Stiction in Nano-Electro-Mechanical Systems Using Liquid Crystals
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DOI：
10.1021/acsnano.6b07495
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发表时间：
2016-12-01
期刊：
影响因子：
17.1
通讯作者：
Fedotov, Vassili A.
中科院分区：
文献类型：
--
作者：
Buchnev, Oleksandr;Podoliak, Nina;Fedotov, Vassili A.
纳米机电系统（NEMS）是一种新兴的设备技术，利用集成电子电路规模上的机械运动，粘滞是限制其实际应用的主要可靠性问题之一。我们报告了一项发现，通过向列液晶渗透NEMS可以消除粘连。我们通过实验证明了这一点，使用基于nems的可调谐光子超材料，在超材料设计允许的整个纳米级结构位移范围内实现了可靠的光响应切换。作为现有防粘解决方案的一种更直接、更易于实现的替代方案，我们的方法还引入了一种主动的粘滞控制机制，可以在无粘滞和NEMS操作的常规（限制粘滞）机制之间切换。它有望极大地扩展机电设备的功能，并使自适应和智能纳米系统的发展成为可能。
Stiction is one of the major reliability issues limiting practical application of nano-electro-mechanical systems (NEMS), an emerging device technology that exploits mechanical movements on the scale of an integrated electronic circuit. We report on a discovery that stiction can be eliminated by infiltrating NEMS with nematic liquid crystals. We demonstrate this experimentally using a NEMS-based tunable photonic metamaterial, where reliable switching of optical response was achieved for the entire range of nanoscopic structural displacements admitted by the metamaterial design. Being a more straightforward and easy-to-implement alternative to the existing antistiction solutions, our approach also introduces an active mechanism of stiction control, which enables toggling between stiction-free and the usual (stiction-limited) regimes of NEMS operation. It is expected to greatly expand the functionality of electro-mechanical devices and enable the development of adaptive and smart nanosystems.