Electron energy-loss spectroscopy for elemental analysis
Electron energy-loss spectroscopy for elemental analysis
复制标题
用于元素分析的电子能量损失光谱
DOI：
10.1098/rsta.1982.0049
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发表时间：
1982
期刊：
影响因子：
--
通讯作者：
R. Egerton
中科院分区：
文献类型：
--
作者：
R. Egerton
电子束微量分析最常通过记录样品发出的 X 射线光谱来进行。然而，另一种方法是分析通过薄样品传输的电子的能谱。对于低原子序数元素的检测和测量，这种能量损失法灵敏度高；据报道，检测量小于 10-20 g，而可达到的空间分辨率可能低于 1 nm。在概述了所涉及的基础物理之后，本文给出了薄膜、插层化合物、陶瓷和生物样品的能量损失分析示例，及其在有机材料辐射损伤测量中的应用。
Electron-beam microanalysis is most commonly carried out by recording the spectrum of X-rays emitted from a sample. However, an alternative method is to analyse the energy spectrum of electrons transmitted through a thin specimen. For the detection and measurement of elements of low atomic number, this energy-loss method is capable of high sensitivity; detection of less than 10-20 g has been reported, while the attainable spatial resolution is probably below 1 nm. After outlining the basic physics involved, the paper gives examples of energy-loss analysis of thin films, intercalation compounds, ceramics and biological samples, and its application to the measurement of radiation damage in organic materials.