Ferroelectric hysteresis and improved fatigue of PZT (53/47) films fabricated by a simplified sol-gel acetic-acid route
Ferroelectric hysteresis and improved fatigue of PZT (53/47) films fabricated by a simplified sol-gel acetic-acid route
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DOI：
10.1007/s10854-014-2237-z
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发表时间：
2014-11-01
影响因子：
2.8
通讯作者：
Yanez-Limon, J. M.
中科院分区：
文献类型：
--
作者：
Rodriguez-Aranda, M. C.;Calderon-Pinar, F.;Yanez-Limon, J. M.
采用溶胶-凝胶醋酸基前驱体溶液自旋涂覆制备了双层Pb(Zr0.53Ti0.47)O-3薄膜。通过衍射、光谱学和显微技术研究了样品的结构特性。退火后的铁电薄膜结晶为纯PZT钙钛矿相。根据衍射图的细化结果，发现了显著的单斜相含量和相对较大的四方c/ A比。没有观察到有机物质的痕迹。薄膜致密性好，晶粒尺寸大，表面粗糙度低。用压响应力显微镜研究了铁电畴分布和局部压响应磁滞回线。该薄膜具有良好的局部铁电性能，且具有较大的d（33）压电系数。从畴分布图分析中也发现了薄膜的自极化程度。具有良好的宏观铁电性能，特别是菱形体含量较少的薄膜。改善的铁电疲劳行为被观察到，薄膜被证明可以维持10(8)个疲劳循环，而初始残余极化仅减少10%。
Double-layer Pb(Zr0.53Ti0.47)O-3 films were fabricated by spin coating of a sol-gel acetic-acid-based precursor solution deposited onto commercial Pt-Si substrates. The structural properties of the samples were studied by several diffraction, spectroscopy and microscopy techniques. The annealed ferroelectric films were crystallized to a pure PZT perovskite phase. A significant monoclinic phase content was found together with a relatively large tetragonal c/a ratio, according to the diffraction pattern refinement results. No traces of organic material were observed. Good film densification with relatively large grain sizes and low surface roughness was achieved. Ferroelectric domain distribution and local piezoresponse hysteresis loops were investigated by piezoresponse force microscopy. The films showed good local ferroelectric properties and a relatively large d(33) piezoelectric coefficient was derived. A degree of self-polarization of the film was also found from the domain distribution-map analysis. Good macroscopic ferroelectric properties were also achieved, specially for the film with less rhombohedral content. An improved ferroelectric fatigue behavior was observed as the films proved to sustain down to 10(8) fatigue cycles with only a 10 % decrease of the initial remnant polarization.