Enhancement of magnetic sensing performance of diamond resonators coupling with magnetic-strictive FeGa films by various interlayers
Enhancement of magnetic sensing performance of diamond resonators coupling with magnetic-strictive FeGa films by various interlayers
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DOI：
10.1016/j.carbon.2022.08.086
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发表时间：
2022-09
期刊：
影响因子：
10.9
通讯作者：
Zilong Zhang;L. Sang;Jian Huang;Linjun Wang;Y. Koide;S. Koizumi;M. Liao
中科院分区：
文献类型：
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作者：
Zilong Zhang;L. Sang;Jian Huang;Linjun Wang;Y. Koide;S. Koizumi;M. Liao
报道了一种提高单晶金刚石MEMS磁敏传感器磁灵敏度的方法，该传感器由单晶金刚石悬臂梁和磁致伸缩Galfenol（FeGa）薄膜组成。为了提高SCD-MEMS磁传感器从室温到高温的磁敏感性能，在SCD悬臂梁和FeGa薄膜之间插入不同的Ti膜、WC膜和WC/Ti膜中间层。FeGa薄膜的微结构、相结构和磁性能的热稳定性被这些中间层大大增强。FeGa/SCD、FeGa/Ti/SCD、FeGa/WC/SCD和FeGa/Ti/WC/SCD结构中的FeGa薄膜分别在高达573 K、773 K、573 K和673 K的退火温度下在表面形貌、粗糙度、相结构和磁性方面保持高热稳定性。FeGa/SCD结构的磁敏元件在573 K时的磁灵敏度最低，为1.96 Hz/mT; FeGa/WC/Ti/SCD结构的磁灵敏度最高，为75.40 Hz/mT。目前的工作提供了一种策略，以定制的SCD MEMS的磁传感性能的极端条件下的应用。
The authors report the enhancement of the magnetic sensitivity of single-crystal diamond (SCD) MEMS magnetic sensor, which is composed of a SCD cantilever integrated with a magneto-strictive Galfenol (FeGa) thin film. To improve the magnetic sensing properties from room temperature to high temperatures, different interlayers of Ti film, WC film, and WC/Ti film are inserted between the SCD cantilevers and the FeGa thin films in the SCD-MEMS magnetic sensors. The thermal-stability of the microstructures, phase structures, and magnetic properties of the FeGa thin films are greatly enhanced by these interlayers. The FeGa thin films within the FeGa/SCD, FeGa/Ti/SCD, FeGa/WC/SCD, and FeGa/Ti/WC/SCD structures maintain high thermal-stability in surface morphologies, roughness, phase structures, and magnetic properties under the annealing temperature up to 573 K, 773 K, 573 K, and 673 K, respectively. The magnetic sensor with the FeGa/SCD structure has the weakest magnetic sensitivity of 1.96 Hz/mT @573 K and the FeGa/WC/Ti/SCD structure hosts the highest magnetic sensitivity of 75.40 Hz/mT @673 K. The present work provides a strategy to tailor the magnetic sensing properties of SCD MEMS for the applications under extreme conditions.