Development and Dynamic Modeling of a New Hybrid Thermopiezoelectric Microactuator
Development and Dynamic Modeling of a New Hybrid Thermopiezoelectric Microactuator
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DOI：
10.1109/tro.2010.2082032
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发表时间：
2010-12
影响因子：
7.8
通讯作者：
M. Rakotondrabe;I. Ivan
中科院分区：
文献类型：
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作者：
M. Rakotondrabe;I. Ivan
提出了一种基于压电效应和热效应相结合的新型混合微驱动器。所提出的驱动器可以通过热驱动执行高行程粗定位和通过压电驱动执行高分辨率精定位。微致动器结构是一个单压电晶片的压电悬臂梁，这也构成了一个热双压电晶片，是非常敏感的温度变化。虽然电压用于控制压电致动，但我们使用Peltier模块来提供温度变化并控制热功能。为了理解混合致动器的行为，开发了一个模型。为了更好的精度，但在同一时间为模型的简单性，热的一部分是仿照热网络，而普朗特-Ishlinskii（PI）滞后的方法是用来模拟压电部分的非线性。最后，一系列的实验结果验证了所开发的模型。
This paper presents a new hybrid microactuator based on the combination of piezoelectric and thermal effects. The proposed actuator can perform both a high-stroke coarse positioning through the thermal actuation and a high-resolution fine positioning through the piezoelectric actuation. The microactuator structure is a unimorph piezoelectric cantilever, which also constitutes a thermal bimorph that is very sensitive to temperature variation. While electrical voltage is used to control the piezoelectric actuation, we use a Peltier module to provide the temperature variation and to control the thermal functioning. In order to understand the behavior of the hybrid actuator, a model is developed. For better precision, but at the same time for model simplicity, the thermal part is modeled with the thermal network, whereas the Prandtl-Ishlinskii (PI) hysteresis approach is used to model the nonlinearity of the piezoelectric part. Finally, a series of experimental results validate the developed model.