Numerical reconstruction of wavefront in phase-shifting point diffraction interferometer by digital holography
Numerical reconstruction of wavefront in phase-shifting point diffraction interferometer by digital holography
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DOI：
10.1002/sia.2815
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发表时间：
2008-06-01
影响因子：
1.7
通讯作者：
Kataoka, Toshihiko
中科院分区：
文献类型：
--
作者：
Matsuura, Toshiaki;Okagaki, Satoru;Kataoka, Toshihiko
采用移相点衍射干涉仪（PS/PDI）测量大口径光学系统的绝对面形。在投影平面上测量包含表面图形轮廓的测量波前的强度和相位分布。相位图给出了镜面的表面图形。然而，由于反射镜的表面形状和点光源的位置，测试镜反射的波前在传播过程中发生了变化。波前与投影平面上的表面图形不同。对于绝对表面剖面，必须根据测量结果重建镜面上的波前。对波前数字全息重建进行了研究。利用亥姆霍兹-基尔霍夫公式建立了数值重建方法。通过对球面凹面镜测量的仿真验证了该方法的有效性。模拟了理想球面反射镜测量、非球面反射镜测量和点光源微位移球面反射镜测量。因此，投影平面上的相位图与表面图形不匹配。光强分布引起了波前的变化。相比之下，在镜面上重建的相位图给出了真实的表面图形。为了精确重建，必须增加投影平面上的采样次数。版权所有(C) 2008约翰威利父子有限公司
A phase-shifting point diffraction interferometer (PS/PDI) is applied for absolute surface figure measurement for large aperture optics. The intensity and phase distributions of measurement wavefront containing the surface figure profile are measured on the projection plane. The phase map gives the surface figure of the mirror. However, the wavefront reflected by the test mirror changes itself while propagating due to the surface figure of the mirror and the position of the point light source. The wavefront is different from the surface figure on the projection plane. For absolute surface profiling, the wavefront on the mirror has to be reconstructed from the measurement results. To reconstruct the wavefront digital holography has been studied. We have developed the numerical reconstruction method by using the Helmholtz-Kirchhoff formula. Spherical concave mirror measurements have been simulated to verify the availability. Ideal spherical mirror measurements, aspherical mirror measurements and a spherical mirror measurement in which the point light source was slightly displaced were simulated. As a result, the phase map on the projection plane did not fit the surface figure. It was also revealed that the light intensity distribution causes changes in the wavefront. In contrast, the reconstructed phase map on the mirror gave the real surface figure. For precise reconstruction the number of sampling on the projection plane must be increased. Copyright (C) 2008 John Wiley & Sons, Ltd.