Enhancement of EUV emission intensity from particles in a droplet by exploding the droplet

Enhancement of EUV emission intensity from particles in a droplet by exploding the droplet
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DOI:
10.1088/0022-3727/42/15/155203
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发表时间:
2009-08
期刊:
Journal of Physics D: Applied Physics
影响因子:
--
通讯作者:
Jingquan Lin;T. Tomie
Jingquan Lin;T. Tomie
中科院分区:
其他
文献类型:
--
作者:
Jingquan Lin;T. Tomie

文献摘要

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激光等离子体是以含有氮化硼(BN)颗粒的水滴为目标,采用预脉冲/主激光脉冲方案产生的,在该方案中,预脉冲被发送以爆炸性地蒸发液滴。对含有BN颗粒的爆炸液滴的阴影测量表明,水块的膨胀速度约为200m S−1,远远高于BN颗粒的膨胀速度(小于5m S−1)。与单激光脉冲发射液滴的情况相比,双脉冲方案使BN颗粒在4.86 nm附近的极紫外(EUV)发射增强到原来的2倍以上。EUV发射的增强归因于液滴爆炸汽化后BN粒子对激光能量的主吸收增加。
Laser plasma is produced with a boron nitride (BN) particle-included water droplet as a target and a pre/main laser pulse scheme in which the pre-pulse is sent to explosively vaporize the droplet. Shadowgraph measurement of the exploded BN particle-included droplet shows that the water block expands at a velocity of about 200 m s−1, which is much higher than the expansion velocity of the BN particles (less than 5 m s−1). Extreme ultraviolet (EUV) emission around 4.86 nm from BN particles is enhanced to more than a factor of 2 with the dual-pulse scheme in comparison with the case of shooting the droplet with a single laser pulse. The enhancement of EUV emission is attributed to an increased main laser energy absorption by the BN particles after explosive vaporization of the droplet.