Near Vacuum Gas Damping in MEMS: Simplified Modeling
Near Vacuum Gas Damping in MEMS: Simplified Modeling
复制标题
DOI：
10.1109/jmems.2017.2686650
复制
发表时间：
2017-06-01
影响因子：
2.7
通讯作者：
Gattere, Gabriele
中科院分区：
文献类型：
--
作者：
Fedeli, Patrick;Frangi, Attilio;Gattere, Gabriele
我们提出了一个简单、快速和实用的仿真工具，用于预测在近真空中工作的微电子机械系统(MEMS)中发生的气体阻尼，该系统具有任意复杂的几何和运动，工作压力范围约为1mbar。该工具基于预计算查找表(随论文分发)，为MEMS的基本块提供了耗散。接下来，采用解耦假设，根据待分析设备的拓扑结构组合块。特别注意使用改进模型产生的数值数据、简单测试设备的文献数据和工业陀螺仪的新实验结果来验证工作假说。[2016-0289]
We propose a simplified, fast, and operative simulation tool for the prediction of gas damping occurring in the microelectromechanical systems (MEMS) of arbitrarily complex geometry and motion, working in near vacuum in a pressure range around 1 mbar. The tool is based on precomputed lookup tables (distributed with the paper), providing dissipation for the elemental blocks of MEMS. Next, adopting a decoupling assumption, blocks are combined according to the topology of the device to be analyzed. Particular attention is devoted to the validation of working hypotheses using numerical data generated by a refined model, data taken from the literature for simple test devices, and new experimental results for industrial gyroscopes. [2016-0289]