Environmentally Robust MEMS Vibratory Gyroscopes for Automotive Applications
Environmentally Robust MEMS Vibratory Gyroscopes for Automotive Applications
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DOI：
10.1109/jsen.2009.2026466
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发表时间：
2009-12-01
影响因子：
4.3
通讯作者：
Shkel, Andrei M.
中科院分区：
文献类型：
--
作者：
Acar, Cenk;Schofield, Adam R.;Shkel, Andrei M.
已知汽车应用对惯性传感器施加相当苛刻的环境条件，例如振动、冲击、温度和热循环。众所周知，微机械陀螺仪由于其对制造和环境变化的动态响应的高灵敏度而在开发和商业化方面特别具有挑战性。为了在要求苛刻的汽车环境中以低成本和高产量的器件满足性能规格要求，需要非常坚固的微机电系统（MEMS）传感元件。本文回顾了结构实现的设计趋势，提供固有的鲁棒性对结构和环境参数的变化，在传感元件的水平。的基本方法是基于获得一个增益和相位稳定区域的频率响应的传感模式动态系统，以实现整体系统的鲁棒性。在稳定感测频率区域中操作提供改进的偏置稳定性、温度稳定性以及对环境和制造变化的免疫力。
Automotive applications are known to impose quite harsh environmental conditions such as vibration, shock, temperature, and thermal cycling on inertial sensors. Micromachined gyroscopes are known to be especially challenging to develop and commercialize due to high sensitivity of their dynamic response to fabrication and environmental variations. Meeting performance specifications in the demanding automotive environment with low-cost and high-yield devices requires a very robust microelectromechanical systems (MEMS) sensing element. This paper reviews the design trend in structural implementations that provides inherent robustness against structural and environmental parameter variations at the sensing element level. The fundamental approach is based on obtaining a gain and phase stable region in the frequency response of the sense-mode dynamical system in order to achieve overall system robustness. Operating in the stable sense frequency region provides improved bias stability, temperature stability, and immunity to environmental and fabrication variations.