Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen
Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen
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开发用于传感氢的高稳定性 Pd-Ni 合金薄膜涂层 SAW 装置
DOI：
10.3390/s19163560
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发表时间：
2019-08-20
期刊：
影响因子：
3.9
通讯作者：
Lu, Minghui
中科院分区：
文献类型：
--
作者：
Wang, Wen;Liu, Xueli;Lu, Minghui
提出了一种用于氢气传感的Pd-Ni合金薄膜表面声波（SAW）器件。将Pd-Ni薄膜溅射到SAW器件的延迟线传播路径上，构建芯片尺寸的氢传感器。采用差分振荡回路对所制备的传感器芯片进行了表征。还评估了Pd-Ni薄膜厚度对传感性能的影响，并确定了最佳参数，以实现快速响应和高灵敏度。该器件具有良好的工作稳定性（半年内检测误差为3.7%）、高灵敏度（21.3 kHz/%）和快速响应（小于10 s）。
A Pd-Ni alloy thin-film coated surface acoustic wave (SAW) device is proposed for sensing hydrogen. The Pd-Ni thin-film was sputtered onto the SAW propagation path of a SAW device with a delay line pattern to build the chip-sized hydrogen sensor. The prepared sensor chip was characterized by employing a differential oscillation loop. The effect of the Pd-Ni film thickness on sensing performance was also evaluated, and optimal parameters were determined, allowing for fast response and high sensitivity. Excellent working stability (detection error of 3.7% in half a year), high sensitivity (21.3 kHz/%), and fast response (less than 10 s) were achieved from the 40 nm Pd-Ni alloy thin-film coated sensing device.