At-wavelength figure metrology of hard x-ray focusing mirrors
At-wavelength figure metrology of hard x-ray focusing mirrors
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DOI：
10.1063/1.2216870
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发表时间：
2006-06
影响因子：
1.6
通讯作者：
H. Yumoto;H. Mimura;S. Matsuyama;Soichiro Handa;Y. Sano;M. Yabashi;Y. Nishino;K. Tamasaku;T. Ishikawa;K. Yamauchi
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文献类型：
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作者：
H. Yumoto;H. Mimura;S. Matsuyama;Soichiro Handa;Y. Sano;M. Yabashi;Y. Nishino;K. Tamasaku;T. Ishikawa;K. Yamauchi
我们发展了硬X射线掠入射聚焦光学系统的波长波前计量。计量是基于从焦点周围的强度分布的数值检索。我们演示了在波长计量和估计的表面形状误差的测试镜。在SPring-8的1 km长的光束线（BL 29 XUL）处进行用于测量聚焦强度分布的实验。所得到的结果进行了比较，使用光学干涉仪测量的轮廓，并被证实是在良好的协议与it. This技术是一个潜在的方法表征波前像差的椭圆镜亚10 nm聚焦。
We have developed an at-wavelength wave-front metrology of a grazing-incidence focusing optical systems in the hard x-ray region. The metrology is based on numerical retrieval from the intensity profile around the focal point. We demonstrated the at-wavelength metrology and estimated the surface figure error on a test mirror. An experiment for measuring the focusing intensity profile was performed at the 1-km-long beamline (BL29XUL) of SPring-8. The obtained results were compared with the profile measured using an optical interferometer and were confirmed to be in good agreement with it. This technique is a potential method of characterizing wave-front aberrations on elliptical mirrors for sub-10-nm focusing.