An advanced high-temperature stable multipole resonance probe for industry compatible plasma diagnostics
An advanced high-temperature stable multipole resonance probe for industry compatible plasma diagnostics
复制标题
用于工业兼容等离子体诊断的先进高温稳定多极共振探头
DOI：
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发表时间：
2018
期刊：
影响因子：
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通讯作者：
P. Uhlig
中科院分区：
文献类型：
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作者：
Dennis Pohle;C. Schulz;I. Rolfes;M. Oberberg;P. Awakowicz;A. Serwa;P. Uhlig
本文介绍了一种基于多极共振探针（MRP）的先进的高温稳定等离子体传感器的发展。使用低温共烧陶瓷（LTCC）作为衬底材料，加上多层结构，提供耐高温和足够的机械稳定性。因此，该传感器可作为一个强大的测量工具，在工业等离子体过程的广泛领域。通过广泛的三维电磁模拟研究了探针确定等离子体电子密度以及电子碰撞频率的能力。在双电感耦合等离子体（DICP）反应器中使用不同气体成分，中性气体温度超过500°C的测量结果证实了探针在高温下精确等离子体监测的适用性。
In this contribution the development of an advanced, high-temperature stable plasma sensor based on the multipole resonance probe (MRP) is presented. Using low temperature co-fired ceramics (LTCC) as substrate material, together with a multilayer structure, provides resistance against high temperatures as well as a sufficient mechanical stability. Therefore, the sensor is applicable as a robust measurement tool in a wide field of industrial plasma processes. The ability of the probe to determine the electron density of the plasma as well as the collision frequency of the electrons is investigated by extensive 3D electromagnetic simulations. Measurements in a double inductively coupled plasma (DICP) reactor using different gas compositions with neutral gas temperatures exceeding 500° C confirm the suitability of the probe for a precise plasma monitoring at high temperatures.