Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements
Characterization progress of a UV-microscope recently implemented at the PTB Nanometer Comparator for uni- and bidirectional measurements
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最近在 PTB 纳米比较器上实现的用于单向和双向测量的紫外显微镜的表征进展
DOI：
10.1051/epjconf/202023806010
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发表时间：
2020
影响因子：
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通讯作者：
B. Bodermann
中科院分区：
文献类型：
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作者：
J. Krüger;R. Köning;B. Bodermann
在这篇文章中，我们强调需要对测量设备进行复杂的表征，特别是光学双向测量。作为一个例子，正在进行的表征紫外显微镜在PTB的线尺度比较器提出。给出了所采用的紫外LED光谱测量的初步结果，并通过严格的模拟说明了LED中心波长偏差对测量结果的影响。
In this contribution, we emphasize the need for a sophisticated characterization of measurement devices in particular for optical bidirectional measurements. As an example, the ongoing characterization of the UV-microscope at PTB’s linescale comparator is presented. First results of spectroscopic measurements of the employed UV-LED are presented and the impact of deviations in the center wavelength of the LED on the measurements are illustrated by rigorous simulations.