3-Dimensional Blow Torch-Molding of Fused Silica Microstructures
3-Dimensional Blow Torch-Molding of Fused Silica Microstructures
复制标题
DOI：
10.1109/jmems.2013.2279165
复制
发表时间：
2013-12-01
影响因子：
2.7
通讯作者：
Najafi, Khalil
中科院分区：
文献类型：
--
作者：
Cho, Jae Yoong;Yan, Jialiang;Najafi, Khalil
This paper presents a new and simple microfabrication process for creating various 3-D microstructures with high-aspect ratios (height/radius > 1). The key feature of this process is the use of a blow torch, which provides very intense localized heat for a short amount of time (
