Nanostructures fabrication by electron beam induced deposition with Fe(CO)5 and H2O followed by thermal treatment
Nanostructures fabrication by electron beam induced deposition with Fe(CO)5 and H2O followed by thermal treatment
复制标题
通过电子束诱导沉积 Fe(CO)5 和 H2O 并随后进行热处理来制造纳米结构
DOI:
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发表时间:
2006
期刊:
影响因子:
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通讯作者:
M. Shimoio and K. Furuya
中科院分区:
文献类型:
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作者:
M. Takeguchi. R. Che;M. Shimoio and K. Furuya