Microfabrication of 3D multidirectional inclined structures by UV lithography and electroplating

Microfabrication of 3D multidirectional inclined structures by UV lithography and electroplating
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UV光刻和电镀微加工3D多向倾斜结构

DOI：
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发表时间：
1994
期刊：
Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
影响因子：
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通讯作者：
de Rooij
de Rooij
中科院分区：
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文献类型：
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作者：
C. Beuret;G. Racine;Gobet;R. Luthier;N.;de Rooij

文献摘要

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提出了一种三维多向倾斜结构的制作新工艺。基于市售厚正性光致抗蚀剂的改进的W曝光和电沉积，该过程可以使用普通的无尘室设备进行。为了实现倾斜结构，通过集成在光致抗蚀剂层中的两个移位掩模执行倾斜旋转曝光。通过两个掩模的孔之间的适当移位，这种新技术允许在同一衬底上制造在任何方向上倾斜并且具有不同倾斜角的三维结构。本文论述了不同的制造步骤和模拟所需的精确确定的几个参数所需的掩模。这些参数，例如孔的尺寸、孔之间的偏移角或两个掩模之间的分离层的厚度，必须针对结构的每个不同的倾斜角来确定。通过这种新的工艺，10/spl度/倾斜结构的高度高达120 /spl μ/m，并与几乎平行的侧壁已被制造。这项技术开辟了广泛的新应用。特别是，一个新的弹性力电机（EFM）的转子的第一个原型已经通过电镀倾斜的腿上先前电镀轮制造。
A new process for the fabrication of 3D multidirectional inclined structures is presented. Based on a modified W exposure of commercially available thick positive photoresist and electrodeposition, this process can be carried out using common clean room equipment. To realise inclined structures, inclined rotating exposures are performed through two shifted masks integrated in the photoresist layers. By adequate shifts between the apertures of both masks, this new technique allows three dimensional structures inclined in any direction and with different tilt angles to be fabricated on the same substrate. This paper deals with the different fabrication steps and the simulation required for the accurate determination of several of the parameters needed for the masks. These parameters, such as the dimensions of the apertures, the shift angles between them or the thickness of the separation layer between the two masks have to be determined for each different tilt angle of the structures. By this new process, 10/spl deg/ inclined structures with heights up to 120 /spl mu/m and with nearly parallel sidewalls have been fabricated. This technology opens a wide range of new applications. In particular, a first prototype of a new rotor for the Elastic Force Motor (EFM) has been fabricated by electroplating tilted legs on a previously electroplated wheel.