Micro-grooving of brittle materials using textured diamond grinding wheels shaped by an integrated nanosecond laser system
Micro-grooving of brittle materials using textured diamond grinding wheels shaped by an integrated nanosecond laser system
复制标题
DOI：
10.1007/s00170-022-08695-2
复制
发表时间：
2021-09
期刊：
影响因子：
--
通讯作者：
Zongchao Geng;Z. Tong;G. Huang;Wenbin Zhong;Changcai Cui;Xipeng Xu;X. Jiang
中科院分区：
文献类型：
--
作者：
Zongchao Geng;Z. Tong;G. Huang;Wenbin Zhong;Changcai Cui;Xipeng Xu;X. Jiang
自由曲面包括非球面和棱镜凹凸曲面，在光学、电子、生物医学等领域有着广泛的应用。最近，据报道，结构化砂轮磨削提供了新的可能性，以产生在硬脆材料的图案。本文报道了激光结构金刚石砂轮在微晶玻璃微槽加工中的最新研究进展。本发明首次将纳秒脉冲激光器集成到超精密机床中，用于超硬磨料砂轮的在线修整，整形、修整和仿形/纹理化。同时，考虑到不同激光照射位置的焦深偏移，提出了一种偏移补偿方法，以精确生成砂轮周边的各种轮廓。利用激光毛化砂轮在陶瓷基体上成功地加工出了三种类型的图形（沟槽、沟槽和柱状物）。结果表明，集成激光系统在成形超硬磨料砂轮方面具有很高的灵活性和精度，利用毛化砂轮进行磨削加工为在硬脆材料上形成功能性微结构提供了一种很有前途的解决方案。
Freeform surfaces including both the aspherical and prismatic concave/convex have been widely utilized in optical, electronical, and biomedical areas. Most recently, it is reported that grinding with structured wheels provides new possibility to generate patterns on hard and brittle materials. This paper reports the latest research progress on micro-grooving glass ceramic using laser structured diamond grinding wheels. A nanosecond pulse laser is firstly integrated into an ultra-precision machine tool and used for the in-line conditioning of super abrasive grinding wheels, i.e., truing, dressing, and profiling/texturing. Meanwhile, an offset compensation method, considering the shifting depth of focus (DoF) at different laser irradiation positions, is proposed to accurately generate various profiles on the periphery of the grinding wheels. Three types of patterns (riblets, grooves, and pillars) are successfully fabricated on the ceramic substrate using the laser textured grinding wheels. The results indicate that the integrated laser system offers high flexibility and accuracy in shaping super abrasive grinding wheels, and the grinding using textured grinding wheels provides a promising solution to generate functional microstructures on hard and brittle materials.