Precision Nanometrology and its Applications to Precision Nanosystems
Precision Nanometrology and its Applications to Precision Nanosystems
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精密纳米计量学及其在精密纳米系统中的应用
DOI：
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发表时间：
2005
期刊：
影响因子：
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通讯作者：
W. Gao
中科院分区：
文献类型：
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作者：
W. Gao
本文介绍了一个新的计量学领域--精密纳米计量学。“精密纳米计量学”是传统的“精密计量学”与新的“纳米计量学”相结合的产物。“精密纳米测量学”在这里被定义为尺寸测量和运动测量的科学，其分辨率为100 μ m至0.1 μ m/不确定度在微米至米的范围内。该定义基于以下事实：纳米工程和精密工业（如半导体工业、精密机床工业、精密仪器工业）中的纳米计量学不仅与测量分辨率和/或不确定度有关，而且与测量范围有关。还应该指出的是，纳米工程中的大多数测量对象的尺寸都大于1微米。在阐述了精密纳米测量的定义后，通过几个实例说明了精密纳米测量在精密纳米系统中的重要作用，包括纳米测量系统、纳米制造系统和纳米机电一体化系统。
In this paper, a new field of metrology called "precision nanometrology" is presented. The "precision nanometrology" is the result of evolutions of the traditional "precision metrology" and the new "nanometrology". "Precision nanometrology" is defined here as the science of dimensional measurement and motion measurement with 100 ㎚ to 0.1 ㎚ resolution/uncertainty within a range of micrometer to meter. The definition is based on the fact that nanometrology in nanoengineering and the precision industries, such as semiconductor industry, precision machine tool industry, precision instrument industry, is not only concerned with the measurement resolution and/or uncertainty but also the range of measurement. It should also be pointed out that most of the measurement objects in nanoengineering have dimensions larger than I micrometer. After explaining the definition of precision nanometrology, the paper provides several examples showing the critical roles of precision nanometrologv in precision nanosystems, including nanometrology system, nanofabrication system, and nanomechatronics system.