Soft x-ray submicron imaging detector based on point defects in LiF
Soft x-ray submicron imaging detector based on point defects in LiF
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DOI：
10.1063/1.2130930
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发表时间：
2005-11-01
影响因子：
1.6
通讯作者：
Petrocelli, G
中科院分区：
文献类型：
--
作者：
Baldacchini, G;Bollanti, S;Petrocelli, G
使用氟化锂（LiF）晶体和薄膜作为成像探测器的EUV和软X射线辐射进行了讨论。EUV或软X射线辐射可以产生稳定的色心，在可见光谱范围内从曝光区域发射强烈的荧光。材料对接收剂量的高动态响应和色心的原子尺度使得该检测器对于以比光波长小得多的空间分辨率成像非常感兴趣。接触显微镜成像的测试网的实验结果表明，400 nm的顺序的分辨率。这种高空间分辨率已经在宽视场中获得，高达几mm（2）。不同的生物样品上获得的图像，以及软X射线激光束的调查。所产生的色心密度作为沉积的X射线剂量的函数的行为和这种新的诊断技术的优点，为相干和非相干EUV源，CCD探测器，照相胶片，和光刻胶相比，进行了讨论。(c)2005年美国物理学会。
The use of lithium fluoride (LiF) crystals and films as imaging detectors for EUV and soft-x-ray radiation is discussed. The EUV or soft-x-ray radiation can generate stable color centers, emitting in the visible spectral range an intense fluorescence from the exposed areas. The high dynamic response of the material to the received dose and the atomic scale of the color centers make this detector extremely interesting for imaging at a spatial resolution which can be much smaller than the light wavelength. Experimental results of contact microscopy imaging of test meshes demonstrate a resolution of the order of 400 nm. This high spatial resolution has been obtained in a wide field of view, up to several mm(2). Images obtained on different biological samples, as well as an investigation of a soft x-ray laser beam are presented. The behavior of the generated color centers density as a function of the deposited x-ray dose and the advantages of this new diagnostic technique for both coherent and noncoherent EUV sources, compared with CCDs detectors, photographic films, and photoresists are discussed. (c) 2005 American Institute of Physics.