Stability and Bifurcation Analysis of Precision Motion Stage With Nonlinear Friction Isolator
Stability and Bifurcation Analysis of Precision Motion Stage With Nonlinear Friction Isolator
复制标题
非线性摩擦隔离器精密运动平台的稳定性和分岔分析
DOI：
10.1115/1.4062266
复制
发表时间：
2023
影响因子：
2
通讯作者：
Barry, Oumar R.
中科院分区：
文献类型：
--
作者：
Gupta, Sunit K.;Basta, Ehab E.;Barry, Oumar R.
基于伺服控制机械轴承的精密运动平台 (MBMS) 的应用在先进制造、半导体行业和计量应用中已得到广泛应用。然而，运动平台的性能受到自激摩擦引起的振动的困扰。最近，引入了一种被动机械摩擦隔离器（FI）来减少MBMS中摩擦的不利影响，因此，在之前的工作中分析了带有FI的MBMS的动力学。然而，在之前的工作中，MBMS 的动力学分析并未考虑 FI 的非线性动力学分量。这项工作对具有非线性 FI 的 MBMS 进行了全面、透彻的分析。具有非线性 FI 的伺服控制 MBMS 被建模为二自由度弹簧-质量-阻尼器集总参数系统。参考速度信号和微分增益参数空间中的线性稳定性分析表明，FI 中包含非线性可显着提高系统定点的局部稳定性。这进一步允许在伺服控制运动级中实现更大的微分增益。此外，我们对系统进行了非线性分析，并观察了摩擦隔离器中存在或不存在任何非线性的亚临界和超临界 Hopf 分岔的存在。然而，稳定曲线上的亚临界和超临界 Hopf 分岔区域取决于 FI 的非线性。这些观察结果通过详细的数值分岔得到进一步验证，揭示了系统中非线性吸引子的存在。
The application of servocontrolled mechanical-bearing-based precision motion stages (MBMS) is well-established in advanced manufacturing, semiconductor industries, and metrological applications. Nevertheless, the performance of the motion stage is plagued by self-excited friction-induced vibrations. Recently, a passive mechanical friction isolator (FI) has been introduced to reduce the adverse impact of friction in MBMS, and accordingly, the dynamics of MBMS with FI were analyzed in the previous works. However, in the previous works, the nonlinear dynamics components of FI were not considered for the dynamical analysis of MBMS. This work presents a comprehensive, thorough analysis of an MBMS with a nonlinear FI. A servocontrolled MBMS with a nonlinear FI is modeled as a two DOF spring-mass-damper lumped parameter system. The linear stability analysis in the parametric space of reference velocity signal and differential gain reveals that including nonlinearity in FI significantly increases the local stability of the system's fixed-points. This further allows the implementation of larger differential gains in the servocontrolled motion stage. Furthermore, we perform a nonlinear analysis of the system and observe the existence of sub and supercritical Hopf bifurcation with or without any nonlinearity in the friction isolator. However, the region of sub and supercritical Hopf bifurcation on stability curves depends on the nonlinearity in FI. These observations are further verified by a detailed numerical bifurcation, which reveals the existence of nonlinear attractors in the system.