A Novel MEMS Tunable Capacitor
A Novel MEMS Tunable Capacitor
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一种新型 MEMS 可调谐电容器
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
R. Mrad
中科院分区：
文献类型：
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作者：
Siyuan He;R. Mrad
提出了一种新型的高调谐比MEMS可调电容器。这种新型的可调电容器由两个平行的电极组成，即固定电极和移动电极，以及六个双向静电致动器，它们能够产生吸引力和排斥力来驱动移动电极。因此，这种新型的可调电容器能够上下双向移动，远离其静态位置，从而实现大的调谐比。通过数值模拟验证了这种新型可调电容的工作原理，并预测在16V的驱动电压下可以实现3：1的调谐比。
A novel MEMS tunable capacitor with a high tuning ratio is presented in this paper. The novel tunable capacitor consists of two parallel electrodes, i.e., fixed and moving electrodes and six bi-directional electrostatic actuators, which are able to produce both attractive and repulsive force to drive the moving electrode. So the novel tunable capacitor is able to move in both directions, up and down, away form its static position and therefore achieve a large tuning ratio. Numerical simulations are used to verify the working principle of the novel tunable capacitor and predict that a tuning ratio of 3:1 can be achieved at a driving voltage of 16 volts.