Micro Incremental Forming of Thin Films
Micro Incremental Forming of Thin Films
复制标题
薄膜的微增量成形
DOI：
10.1299/jsmelem.2007.4.9b239
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发表时间：
2007
期刊：
影响因子：
--
通讯作者：
Shunsuke Satou
中科院分区：
文献类型：
--
作者：
T. Obikawa;Shunsuke Satou
：本文描述了薄膜的微增量成形。本研究使用运动分辨率小于0.1微米的台式数控铣床来形成三种薄膜。成型工具是带有圆头的棒。研究发现，工具的旋转速度高达 10000 rpm 会促进工具-薄膜接触区域附近的局部塑性变形，并提高薄膜的成形极限。研究还发现，最佳轴向进给量位于工件厚度附近。最终在优化条件下成功增量成形了0.8微米厚的铝薄膜。
: This paper describes micro incremental forming of thin films. A desk-top type of CNC milling machine with motion resolutions less than 0.1 micrometers was used to form three kinds of thin films in this study. A tool for forming is a bar with a round tip. It was found that the rotation of a tool up to 10000 rpm promotes the local plastic deformation near the tool-film contact area and improves the forming limit of thin films. It was also found that the optimum axial feed is around the thickness of the workpiece. Finally, incremental forming of a thin aluminum film 0.8 micrometers thick was conducted successfully under optimized conditions.