Design, development and experiments of a high stroke-precision 2DoF (linear-angular) microsystem
Design, development and experiments of a high stroke-precision 2DoF (linear-angular) microsystem
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高行程精度2DoF（线性角度）微系统的设计、开发和实验
DOI：
10.1109/robot.2006.1641787
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
P. Lutz
中科院分区：
文献类型：
--
作者：
M. Rakotondrabe;Y. Haddab;P. Lutz
本文介绍了一个两自由度（2DoF）微系统的设计，开发和实验。微系统的独创性在于它能够独立地进行角运动和线性运动，具有非常高的行程和亚微米精度。首先介绍了目标性能。之后，粘滑压电微致动器的使用。然后，详细介绍了它们在微系统中的集成。最后给出了实验结果
This paper presents the design, the development and the experiments on a two degrees of freedom (2DoF) microsystem. The originality of the microsystem is its ability to do angular and linear motions independently with a very high stroke and a submicrometric precision. The target performances are first presented. Afterwards the stick-slip piezoelectric microactuators that are used are presented. Then, their integration inside the microsystem is detailed. Finally, results of experiments are given