Characterization of piezoelectric polymer composites for MEMS devices
Characterization of piezoelectric polymer composites for MEMS devices
复制标题
用于 MEMS 器件的压电聚合物复合材料的表征
DOI：
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发表时间：
2012
影响因子：
1.8
通讯作者：
G. Prasad
中科院分区：
文献类型：
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作者：
C. Rao;G. Prasad
Composite piezoelectric ceramics are important materials for transducer applications in medical diagnostic devices and MEMS devices. In micrometer scale the material properties of piezopolymers or piezoceramics do not coincide with that of bulk materials. The present work is aimed at simulating the material properties of piezoceramics and piezo-polymer composite thin films in the micrometer scale and then to determine the piezo-composite material properties. Piezoceramics have very high electromechanical coupling coefficient (k). But they have very high acoustic impedance and they are very brittle especially when thin films are fabricated. Piezopolymer like PVDF has low acoustic impedance and can be fabricated into thin films but it has very low k value and high dielectric losses. The combination of piezoceramics and piezopolymers form the piezocomposites, which have suitable material properties for transducer applications. The composites can have different connectivities. For 2–2 composite, we can select two layers or a stack of PZT and PVDF layers. It is intended to determine the material properties both analytically and by simulation using computer simulation ANSYS software which implements finite element method (FEM). Although the simulation process presents approximate results, it can be verified from the large available experimental data from the literature with the simulated data.
