Phase retrieval for optical metrology
Phase retrieval for optical metrology
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DOI：
10.1117/12.2071038
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发表时间：
2014-11
期刊：
影响因子：
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通讯作者：
G. Pedrini;A. Faridian;A. Singh;W. Osten
中科院分区：
文献类型：
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作者：
G. Pedrini;A. Faridian;A. Singh;W. Osten
Phase retrieval methods have useful applications for optical imaging, metrology and 3D reconstruction. One such technique to recover the phase of the object wavefront is digital holography. In this paper we will show applications of digital holographic techniques for the time resolved measurement of deformation of microelectromechanical systems (MEMS) and for determination of residual stresses. Furthermore digital holography can be used for the investigations of microscopic samples and its resolution can be increased by using short wavelength and oblique illumination. We will see as well that dark-field digital holographic microscopy can be used to visualize biological specimens. A phase retrieval methods, which does not use a reference wave is also described in the last part of the paper.
