Characterisation of MEMs mirrors for use in atmospheric and ocular wavefront correction

Characterisation of MEMs mirrors for use in atmospheric and ocular wavefront correction
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用于大气和人眼波前校正的 MEM 反射镜的表征

DOI:
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发表时间:
2008
期刊:
SPIE MOEMS-MEMS
影响因子:
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通讯作者:
R. Mackey
R. Mackey
中科院分区:
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文献类型:
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作者:
N. Devaney;D. Coburn;C. Coleman;J. Dainty;E. Dalimier;T. Farrell;David Lara;David Mackey;R. Mackey

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位于高威的爱尔兰国立大学的应用光学小组从事自适应光学在眼睛和大气波前校正中应用的各个方面的研究。大量的商业可变形镜已被选定的AO实验组,这些镜子已被仔细表征,以确定其适用于这些任务。在本文中,我们描述了我们所使用的方法,在表征可变形反射镜和目前的结果,几个MEMS反射镜,包括膜反射镜,从IRISAO和140致动器反射镜,从波士顿微机械公司的IRISAO和柔性光学BV,一个分段的反射镜。
The Applied Optics group at the National University of Ireland, Galway, is engaged in research into various aspects of the application of adaptive optics to both ocular and atmospheric wavefront correction. A large number of commercially available deformable mirrors have been selected by the group for AO experiments, and these mirrors have been carefully characterised to determine their suitability for these tasks. In this paper we describe the approach we have used in characterising deformable mirrors and present results for several MEMs mirrors, including membrane mirrors from AgilOptics and Flexible Optical BV, a segmented micromirror from IrisAO and a 140-actuator mirror from Boston micromachines.
DOI: 10.1364/josaa.19.002329
发表时间: 2002-12-01
影响因子: 1.9
作者:
Thibos, LN;Hong, X;Cheng, X
通讯作者: Cheng, X