The Planar Multipole Resonance Probe: Challenges and Prospects of a Planar Plasma Sensor
The Planar Multipole Resonance Probe: Challenges and Prospects of a Planar Plasma Sensor
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DOI：
10.1109/tim.2014.2358111
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发表时间：
2015-04-01
影响因子：
5.6
通讯作者：
Rolfes, Ilona
中科院分区：
文献类型：
--
作者：
Schulz, Christian;Styrnoll, Tim;Rolfes, Ilona
提出了一种新型的紧凑型等离子体传感器适用于工业等离子体过程的监督和控制。基于多极共振探针（MRP），新的平面MRP（pMRP）被引入作为一个强大的和经济的监测工具，齐平安装到反应堆壁。因此，它可以用于有效抑制等离子体过程本身的干扰。使用CST微波工作室的三维电磁场模拟，pMRP的研究和挑战，以及新的传感器设计的前景进行了详细讨论。三种不同的传感器版本，并与MRP的谐振行为进行比较。此外，有关位置公差的限制和pMRP的适用性得到证明。在一个双电感耦合等离子体，氩气作为工艺气体和不同的激励功率的测量，证明了pMRP的监测目的的适用性。
A novel compact plasma sensor applicable for the supervision and control of industrial plasma processes is presented in this contribution. Based on the multipole resonance probe (MRP), the new planar MRP (pMRP) is introduced as a powerful and economical monitoring tool, flush-mounted into the reactor wall. Hence, it can be used for an effective suppression of disturbances of the plasma process itself. Using 3D electromagnetic field simulations with CST Microwave Studio, the pMRP is investigated and challenges as well as prospects of the new sensor design are discussed in detail. Three different sensor versions are presented and compared with the resonance behavior of the MRP. Furthermore, limitations concerning position tolerances are shown and the suitability of the pMRP is proven. Measurements in a double inductive coupled plasma, with argon as process gas and varying excitation powers, demonstrate the suitability of the pMRP for monitoring purposes.